Nitrogen trifluoride
IUPAC name	Nitrogen trifluoride
Other names	Nitrogen fluoride Trifluoramine Trifluorammonia
Identifiers
CAS number	[7783-54-2]
Properties
Molecular formula	NF3
Molar mass	71. IUPAC Nomenclature is a system of naming Chemical compounds and of describing the science of Chemistry in general CAS registry numbers are unique numerical identifiers for Chemical compounds Polymers biological sequences mixtures and Alloys They are also referred to A chemical formula is a way of expressing information about the Atoms that constitute a particular Chemical compound, and how the relationship between those atoms changes Molar mass, symbol M, is the Mass of one mole of a substance ( Chemical element or Chemical compound) 0019 g/mol
Appearance	colorless gas
Density	3. The density of a material is defined as its Mass per unit Volume: \rho = \frac{m}{V} Different materials usually have different 003 kg/m3 (1. 013 bar and 15 °C) gas 1540 kg/m3 (1. 013 bar at boiling point) liquid
Melting point	−206. The melting point of a solid is the temperature range at which it changes state from solid to Liquid. 8 °C (66. 35 K)
Boiling point	−129. The boiling point of a liquid is the temperature at which the Vapor pressure of the liquid equals the environmental pressure surrounding the liquid 1 °C (144. 05 K) (1. 013 bar)
Solubility in water	0. Solubility is the characteristic Physical property referring to the ability of a given substance the Solute, to dissolve in a Solvent. Water is a common Chemical substance that is essential for the survival of all known forms of Life. 021 vol/vol (20 °C and 1 bar)
Structure
Molecular shape	trigonal pyramidal
Dipole moment	0. Molecular geometry or molecular structure is the three- Dimensional arrangement of the Atoms that constitute a Molecule. In physics there are two kinds of dipoles ( Hellènic: di(s- = two- and pòla = pivot hinge An electric dipole is a 234D
Hazards
MSDS	[1] Dead link May 2007
EU classification	not listed
NFPA 704	0 2 0
Flash point	non-flammable
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references

Nitrogen trifluoride, NF₃, a binary compound of nitrogen and fluorine, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure. A material safety data sheet ( MSDS) is a form containing data regarding the properties of a particular substance Council Directive 67/548/EEC of 27 June 1967 on the approximation of laws regulations and administrative provisions relating to the classification packaging and labelling Symbolism The four divisions are typically color-coded with blue indicating level of Health Hazard, red indicating The flash point of a flammable liquid is the lowest Temperature at which it can form an ignitable mixture in air In Chemistry, the standard state of a material is its state at 1 bar (100 Kilopascals exactly Nitrogen (ˈnaɪtɹəʤɪn is a Chemical element that has the symbol N and Atomic number 7 and Atomic weight 14 Fluorine, fluorum meaning "to flow" is the Chemical element with the symbol F and Atomic number 9 It has a characteristic moldy odor. It is a pulmonary irritant with toxicity comparable with nitrogen oxides. The term nitrogen oxide typically refers to any Binary compound of Oxygen and Nitrogen, or to a mixture of such compounds Nitric It may damage liver and kidneys. It is slightly soluble in water without undergoing chemical reaction.

Contents 1 Use 2 History 3 References 4 External links

Use

Nitrogen trifluoride is used in the plasma and thermal cleaning of CVD reactors. Chemical vapor deposition (CVD is a Chemical process used to produce high-purity high-performance solid materials It is also used as a source of fluorine radicals for plasma etching of eg. In Chemistry, radicals (often referred to as free radicals) are atoms molecules or ions with Unpaired electrons on an otherwise Open shell Plasma etching is a form of Plasma processing used to fabricate integrated circuits polysilicon, silicon nitride, tungsten silicide, and tungsten, in which application it can replace perfluorocarbons (eg. Silicon nitride (Si3N4 is a hard solid substance It is the main component in silicon nitride Ceramics which have relatively good shock resistance Tungsten (ˈtʌŋstən also known as wolfram (/ˈwʊlfrəm/ is a Chemical element that has the symbol W and Atomic number 74 Perfluorocarbons (PFCs are compounds derived from Hydrocarbons by replacement of Hydrogen Atoms by Fluorine atoms hexafluoroethane) and sulfur hexafluoride, resulting in both ecological advantage and higher process efficiency. Hexafluoroethane is a Perfluorocarbon (a completely fluorinated Haloalkane) derived from Ethane. Sulfur hexafluoride is an Inorganic compound with the formula. It is compatible with the metals steel and Monel(TM), and several plastics. Monel is a Trademark of Special Metals Corporation for a series of nickel Alloys primarily composed of Nickel (up to 67% and Copper It is a potent oxidizer, used to oxidize some high-energy fuels, preparation of tetrafluorohydrazine, and to fluorinate fluorocarbon olefins. Tetrafluorohydrazine,, is a colourless reactive inorganic Gas. Fluorocarbons are chemical compounds that contain Carbon - Fluorine bonds The relatively low reactivity and high polarity of the carbon-fluorine bond imparts In Organic chemistry, an alkene, olefin, or olefine is an unsaturated Chemical compound containing at least one Carbon

Nitrogen trifluoride is also used as a fuel for hydrogen fluoride and deuterium fluoride lasers, types of chemical lasers. The hydrogen fluoride laser is an Infrared Chemical laser. It is capable of delivering continuous output power in the Megawatt range A chemical laser is a Laser that obtains its energy from a Chemical reaction. it is very neutral compound.

History

Otto Ruff started his first unsuccessful experiments to synthesize nitrogen trifluoride in 1903. Otto Ruff ( December 12, 1871 - September 17, 1939) was a German Chemist. Unlike many other fluorinated compounds, nitrogen trifluoride cannot be formed simply by mixing nitrogen and fluorine gases together, and so is more challenging to produce. After 25 years he retried the synthesis and generated the nitrogen trifluoride, which was far less reactive and non explosive than nitrogen trichloride, by the electrolysis of a molten mixture of ammonium fluoride and hydrogen fluoride. Nitrogen trichloride, also known as trichloramine, trichlorine nitride is the Chemical compound with the formula NCl3 Ammonium fluoride, F may be obtained by neutralizing Ammonia with Hydrofluoric acid. Structure HF forms orthorhombic crystals consisting of zig-zag chains of HF molecules ^[1]

References

External links

• National Pollutant Inventory - Fluoride and compounds fact sheet

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